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СТАНДАРТНАЯ ЯЧЕЙКА |
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Specifications |
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STANDARD EFFUSION CELLS
GROUP III AND OTHER
MEDIUM VAPOR PRESSURE MATERIALS
- One uniform heating zone, robust single filament
- Compatibility with all common power units
- Wide range of crucible capacities
- Double parallel thermocouple
- Compatible with most MBE systems
- Optional integrated / cooling shutter
- Modular design
- Operating temperature range: 700°C - 1400°C
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Average Power consumption for small and large capacity cell |
This is the most common kind of MBE source. Radiative heat from a filament surrounding the source crucible induces thermal evaporation and produces a flux of source material towards the substrate. Source temperature (and emitted flux) is regulated by means of a feedback loop between the filament’s external power supply and a thermocouple in contact with the source crucible.
ADDON INNOVATION:
These are general purpose cells, but temperature is not homogeneous within the crucible. Indeed, the temperature can vary strongly (hundreds of degrees) between the bottom and the lip of the crucible ("Cold Lip" effect). Nevertheless, this cell is widely used since it is easily operated and needs only one power unit and PID control system.
ADDON has created a new type of single filament oven for standard effusion cells, which decreases the temperature gradient by preferentially heating the top of the crucible and improving the thermal efficiency. Thus spitting and deposition around the top of the crucible are significantly reduced.
Recommended Materials: The standard cell is appropriate for low vapor pressure materials (700 to 1200°C).
For Aluminum the "Cold Lip" model or the " New hot zone/cold zone Al Source " model created by ADDON, for growths in a nitrogen or ammonia atmosphere are recommended.
Compatibility:
This cell comes in various models and is fully compatible with existing systems manufactured by Riber, Varian , VG, SVT, EPI, Perkin-Elmer, Anelva and Ulvac.
Other versions are available on request: please provide us with details of desired flange size, connecting tube, and in-vacuum length.
Thermocouple: The C Type (W/Re5/26%) is provided (except by special request). All ADDON cells use double parallel T/C at each temperature measurement point. T/C’s are spring loaded for a consistent thermal transfer.
Power systems and Temperature Controller: ADDON has designed its cells so as to mate with standard MBE system power supplies. A single power/PID control system is needed for Standard, Low Temperature (Hot Lip) and Cold Lip cells and a double channel power/PID control sytem is needed for a Double Zone cell.
Most existing power supplies are compatible. ADDON models are recommended if new power units are needed
(see specific documentation).
NOTES STANDARD CELLS (UNIFORM FILAMENT)
Crucible Capacity, quoted below, correspond to a crucible in vertical orientation.
a: specify system power supply or ADDON
b: specify system connectors or ADDON
c: specify home made system or EPI, DCA, EIKO etc...
Integrated shutter:
An integrated shutter mechanism can be fitted on most of the cells described here.
Integrated cooling circuit:
If necessary a water cooling circuit can be integrated on most of the cells described here.
VG compatible cells integrate the cooling circuit as a standard feature.
SPECIFICATIONS:
| Filament: |
One Uniform Filament |
| Maximum Operating Temperature: |
1 400 °C |
| Maximum Outgassing Temperature: |
1 600 °C |
| Temperature Stability: |
better than +/- 0.1 °C |
| Thermocouples: |
Double type (W Re 5/26%) |
MINIMUM MOUNTING FLANGE
Crucible Capacity:
Higher capacities: |
25 35 40 58 35CF / 70mm / 2.75"
60 70 85 125 150 63CF / 114 mm / 4.5"
Please contact us |
| In-Vacuum Diameter: |
Crucible O.D plus 0.2 mm |
| In-Vacuum Length: |
200 to 400 mm. Please contact us for other values. |
| Temperatures / Power Consumption: |
See curves |
| Power Supply Connectors: |
System or ADDON via universal UNIPLUG |
| OPTION: |
-Other types of thermocouples
-Integrated cooling circuit
-Integrated shutter
-Inserts |
| WARRANTY: |
Two years: see product policy section |
Thermocouples: For low vapor pressure materials (i.e. group III) the C type is recommended. The C type is furnished as standard.
K, D and other types are available if required.
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MBE
Manufacturer |
MBE
Model Number |
Min
Connecting Flange |
Crucible Capacity (cc) |
Cell
Model Number |
Crucible
Model Number |
| RIBER |
1000/32/2300 |
DN40CF
2,75" (70mm) |
10
25
35
58 |
ST10RB1
ST25RB2
ST35RB3
ST58RB3 |
835010
835025
835035
835058 |
| EPINEAT COMPACT 21 |
DN63CF
4" (114 mm) |
90 |
ST90RE |
763090 |
DN63CF
4" (114 mm) |
60 |
ST60RE |
763060 |
DN63CF
4" (114 mm) |
150 |
ST150RE |
763150 |
| 48/49 |
DN150CF
10" (254 mm) |
700
1200 |
ST700R8
ST1200R8 |
700700
800120 |
VG
All cells except 70 cc have Integrated Water Cooling |
V80 |
DN63CF
4" (114 mm) |
30
40
70
85
150 |
ST30VG8
ST40VG8
ST70VG8
ST85VG8
ST150VG8 |
763030
763040
763070
763085
863150 |
| V90 |
DN63CF
4" (114 mm) |
30
40
70
85
150 |
ST30VG9W
ST40VG9W
ST70VG9
ST85VG9W
ST150VG9W |
763030
763040
763070
763085
863150 |
| V100 |
DN40CF
2,75" (70 mm) |
200
285
500 |
ST200VG1W
ST285VG1W
ST500VG1W |
700200
700285
800500 |
| Varian / Intervac |
Gen II |
DN40CF
2,75" (70mm) |
16
40 |
ST16VA2
ST40VA2 |
763016
863040 |
| Mod Gen II |
DN63CF
4" (114 mm) |
60
125 |
ST60VA3
ST125VA3 |
763060
863125 |
Others
and manufacturers not listed above Integrated Water Cooling is a factory option
* |
Flange Size |
DN40CF
2,75" (70 mm) or higher |
6
10
20
25
35
58 |
ST06AD
ST10AD
ST20AD
ST25AD
ST35AD
ST58AD |
83506
835010
835020
835025
835035
835058 |
| Flange Size |
DN63CF
4" (114 mm)
or higher |
30
40
70
85
90
150 |
ST30AD
ST40AD
ST70AD
ST85AD
ST90AD
ST150AD |
763030
763040
763070
763085
763090
863150 |
| Flange Size |
DN100CF
6" (152 mm)
or higher |
200
285
500 |
ST200AD
ST285AD
ST500AD |
700200
700285
800500 |
| Flange Size |
DN150CF
10" (254 mm)
or higher |
700
1200 |
ST700AD
ST1200AD |
700700
800120 |
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* When needed Integrated Water Cooling can be added as a factory option (W).
Please, do not hesitate to contact ADDON if your system is not listed above or if your system is a custom designed one. |
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