,
/: (495) 916-1173 / 916-1594 / 916-1867. E-mail: komef@komef.ru
: 105120, , ., 6, ""
ADDON

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Specifications
  • Doping of Si and evaporation of metals (Fe, Co, Cr, Ni...) Cu,Dy,Bi, Er,Y,CaF2,BaF2..., for superconductor films
  • Ultra High Vacuum design, clean and easy to use
  • Temperature of utilization: 500 to 2000C
  • No insulating material within high temperature zone: clean operation
High Temperature Cell (here with water cooling and shutter options)
Deposition Rate of Vanadium versus TC temperature provided by ADDON High Temperature Cell*.
Deposition Rate Stability of Vanadium measured
with Quartz balance provided
by the High Temperature Cell*.
*(Coutesy of K. Dumenil. Laboratoire de Physique des Materiaux. Universite H. Poincarre Nancy.)

This cell is designed for ease of use with low vapor pressure materials which usually require an electron-gun for evaporation. The necessary temperatures for most vacuum thin film deposition operations can, in fact, be achieved readily through use of a robust resistively heated filament. Because this filament is self-supporting it is also possible to remove insulating material from the hot zone and avoid the problem of contamination due to insulator outgassing during operation.

A thermocouple controls the temperature of evaporation and replaces the quartz balance.
Doping of Silicon or its metal alloys can also be made with such a cell, using the usual ports of MBE or UHV standard systems, with no additional or cumbersome installation/operation processes.


CRUCIBLES:

Several types of crucibles can be employed, according to the source material to be evaporated, and the desired application. Two capacities and four different crucible materials are available. The following table outlines the possible reactions between source elements and crucible materials plus the most commonly employed compound and crucible material combinations. Standard crucibles are made of either High Purity Alumina, PBN, Pyrolitic Graphite or Tantalum. Other crucible materials, as well as chemical resistant liners for tungsten crucibles, are also available on request.
These crucibles are available in two capacities: 6 and 12 cc. The geometry allows good homogeneity on 2" and 3" substrates in most MBE or UHV systems.

Integrated shutter:
An integrated shutter mechanism can be fitted on most of the cells described here.

Integrated cooling circuit:
If necessary a water cooling circuit can be integrated on most if the cells described here.

SPECIFICATIONS:

Filament: W, no insulator support
Maximum Operating Temperature: 1 500 to 2 000 C
Maximum Outgassing Temperature: 2 100 C
Temperature Stability: better than +/- 0.1 C
Thermocouples: One Double C type (W Re 5/26%)
MINIMUM MOUNTING FLANGE: 35CF / 70mm / 2.75"
In-Vacuum Diameter: 37 mm
In-Vacuum Length: 200 to 400 mm. Please contact us for other values.
Temperatures / Power Consumption: See curves
Power Supply Connectors: System or ADDON
OPTION: -Other types of thermocouples
-Integrated cooling circuit
-Integrated shutter
WARRANTY: Two years: see product policy section


CRUCIBLE SELECTION
Reaction of elements and compounds with some crucible materials at high temperatures.
Material Fusion
T C
T C
@10-4 mb
Crucible Material Remarks
Al2O3 PBN PG Ta
Silver 961 1105 Y Y N Y
Barium 710 735 N N N Y Forms alloys with ceramics
BaF2 1280 700 N N N Y Use a slow heating
Boron 2100 1797 N N Y N
CaF2 1360 1100 Y N N Y Use a slow heating
Cerium 795 1380 Y N Y Y Forms borides
CeF3 1418 900 N N N Y Use a slow heating
Chromium 1890 1157 Y N N N Violent reaction with PBN
Cobalt 1495 1200 Y N N N Very reactive with PBN at 1 500 C
Copper 1083 1018 N Y N Y
Dysprosium 1408 900 N Y N Y
Erbium 1496 930 N N N Y
Gadolinium 1312 1175 N Y N N
Germanium 937 1167 N Y N N Wets refractories
Iron 1535 1180 Y N N N Violent reaction with PBN
Lanthanum 920 1388 Y N N Y
Lutecium 1663 1376 Y N N Y Sublimes
Neodymium 1024 1062 Y N N Y
Nickel 1453 1261 Y N N N Reacts with PBN at 1 000 C
Niobium 2468 2287 N N N Y
Gold 1062 1131 Y Y Y N
Palladium 1550 1240 Y N N N Forms alloys with refractories
Platinium 1769 1747 Y N Y N Reacts with PBN at 1 500 C
Rhodium 1966 1707 N N Y N
Scandium 2300 1002 Y N N Y
Silicon 1410 1337 N N Y N Slow reaction with PBN
Terbium 1357 1150 Y N N N
Titanium 1675 1453 Y N Y N Forms TiB2 with PBN
Vanadium 1910 1332 N N N Y
Yttrium 1509 1157 Y N N Y

Other types of crucible materials can be furnished on request. Inserts or liners can also be made according to your specifications.
They are generally used inside a W crucible.

Flange Size Integrated
Water Cooling
Integral
Shutter
In vacuum
O.D.
6 cc Model Number 12 cc Model Number
DN40CF
2,75" (70mm)
NO NO 36,8 (1,45") HT6 HT12
DN63CF
4,5" (114 mm)
NO NO 36,8 (1,45") HT6 HT12
DN63CF
4,5" (114 mm)
YES NO 45 (1,73") HT6-W HT12-W
DN63CF
4,5" (114 mm)
NO YES 45 (1,73") HT6-PS HT12-PS
DN63CF
4,5" (114 mm)
YES YES 52 (2,17") HT6-W-PS HT12-W-PS
IW = Integrated Water Cooling
PS = Pneumatic Shutter
In-vacuum Cell Length : According to Commercial Cell Length, typical range is to 250 to 326 mm.
Other lengths are available by request with extra charges.




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