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ЛЕГИРУЮЩАЯ ЯЧЕЙКА |
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Specifications |
Model Number |
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- Low thermal inertia/low volume/uniform beam distribution
- High thermal efficiency (limits outgassing)
- Crucible volume and shape tailored to dopant evaporation
- Optional integrated cooling/shutter
- Compatible with commonly used power units
- Modular design
- Double thermocouple
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Responses of a usual (conventional) dopant cell and an ADDON 12 cc dopant cell for a 100°C temperature step |
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Si Doping Cell (72 cc) |
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| Small and High Capacity Dopant Cell power consumption |
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Dopant Cell responses at various
temperatures (72 cc) |
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The cells for dopants must match specific requirements different from those for main materials: i.e. low quantities of source materials; evaporation at high temperature and a rapid reaction to a set point variation are often required. It is, therefore, better to use a cell specially designed for this purpose. ADDON presents three cells for dopants corresponding to the three classes of commonly used systems:
· Monosubstrate: diameter 10 to 75 mm: crucible 5 cc (I.D. = 20mm) and 10° tap
· Multisubstrate platen: diameter max. 120 mm: 12 cc (I.D. = 26mm) and 10° tap
· Production Multisubstrate platen: diameter max. 360 mm: 72 cc (I.D. = 51mm) and 13° tap
A low load is installed in these large diameter/large angle crucible cells to give a uniform flux. Furthermore, the combination of this low load with a suitable configuration of heating elements and thermal shielding gives a rapid response to temperature increases. In addition, the shutter position does not influence the temperature within the crucible.
Recommended materials:
This cell for dopants is especially suited for low/medium vapor pressure materials (T = 700 to 1400°C).
For example: Si, Sn, Be, Y, Dy, Er, SnTe, PbTe.
Compatibility:
The cell exists in models fully compatible with existing systems manufactured by Varian, VG, Perkin-Elmer, DCA, Anelva and Riber. Other versions are available as an option (please provide us with details of flange size, connecting tube I.D. and in vacuum length).
Thermocouples:
The C type (W/Re 5/26%) is provided, unless there are special requirements.
Power Units and Temperature Controller:
Most existing power units are compatible. ADDON models are recommended if a new power unit is needed.
Crucibles:
5, 12 and 72 cc crucibles are available, depending on the MBE system or application. The size of the crucible is calculated to achieve a uniformity of better than 1 %.
Integrated shutter:
An integrated shutter mechanism can be fitted on most of the cells described here.
Integrated cooling circuit:
If necessary a water cooling circuit can be integrated on most if the cells described here.
*V100, RIBER 48/49 and EPINAT cells need a water cooling circuit which can be integrated on the cell flange or on a separate double flange. Please consult us.
SPECIFICATIONS:
| Filament: |
One |
| Maximum Operating Temperature: |
1 500 °C |
| Maximum Outgassing Temperature: |
1 600 °C |
| Temperature Stability: |
better than +/- 0.1 °C |
| Thermocouples: |
One double C type (W Re 5/26) |
MINIMUM MOUNTING FLANGE
Crucible Capacity: |
5 12 35CF / 70mm / 2.75"
72 100CF / 150 mm / 6" |
| In-Vacuum Diameter: |
Crucible O.D plus 0.2 mm |
| In-Vacuum Length: |
200 to 400 mm. Please contact us for other values. |
| Temperatures / Power Consumption: |
See curves |
| Power Supply Connectors: |
System or ADDON |
| OPTION: |
-Other types of thermocouples (K,...)
-Integrated cooling circuit
-Integrated shutter
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| WARRANTY: |
Two years: see product policy section |
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Top of the page |
MBE
Manufacturer |
MBE
Model Number |
Min
Connecting Flange |
Crucible Capacity (cc) |
Cell
Model Number |
Crucible
Model Number |
| RIBER |
1000/32/2300 |
DN40CF
2,75" (70mm) |
5
12 |
DP05RB2
DP12RB3 |
735005
735012 |
| EPINEAT COMPACT 21 |
DN63CF
4" (114 mm) |
5 |
DP05RB2 |
735005 |
DN63CF
4" (114 mm) |
12 |
DP12RE |
735012 |
| 48/49 |
DN150CF
10" (254 mm) |
72 |
DP72RE |
70072 |
VG
All dopant cells
have Integrated Water Cooling (W) |
V80 |
DN63CF
4" (114 mm) |
12 |
DP12VG8 |
735012 |
| V90 |
DN63CF
4" (114 mm) |
12 |
DP12VG9 |
735012 |
| V100 |
DN100CF
6" (152 mm) |
72 |
DP72VG1 |
70072 |
| Varian / Intervac |
Gen II |
DN40CF
2,75" (70mm) |
5
12 |
DP05VA2
DP12VA2 |
735005
735012 |
| Mod Gen II |
DN63CF
4" (114 mm) |
5
12 |
DP05VA3
DP12VA3 |
735005
735012 |
Others
and manufacturers not listed above Integrated Water Cooling is a factory option
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Flange Size |
DN40CF
2,75" (70 mm)
or higher |
5
12 |
DP05AD
DP12AD |
735005
735012 |
| Flange Size |
DN63CF
4" (114 mm)
or higher |
5
12 |
DP05AD
DP12AD |
735005
735012 |
| Flange Size |
DN100CF
6" (152 mm)
or higher |
72 |
DP72AD |
70072 |
| Flange Size |
DN150CF
10" (254 mm)
or higher |
72 |
DP72AD |
70072 |
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* When needed Integrated Water Cooling can be added as a factory option (W).
Do not hesitate to contact ADDON if your system is not listed above or if your system is a custom designed one. |
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